Integrated microcantilevers for high-resolution sensing and probing

	Integrated microcantilevers for high-resolution sensing and probing
	Li, XX ; Lee, DW
刊名	MEASUREMENT SCIENCE & TECHNOLOGY
	2012
卷号	23 期号:2 页码:22001
关键词	integrated cantilever micro-sensor scanning probe microscopy resonance mode surface-stress nano-tip based instrument
ISSN号	0957-0233
通讯作者	Li, XX (reprint author), Chinese Acad Sci, Shanghai Inst Microsysytem & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China.
中文摘要	This topical review is focused on microcantilever-based sensing and probing functions that are realized by integrating a mechanically compliant cantilever with self-sensing and self-actuating elements, specific sensing materials as well as functionalized
学科主题	Engineering; Instruments & Instrumentation
收录类别	2012SCI-205
原文出处	10.1088/0957-0233/23/2/022001
语种	英语
公开日期	2013-04-23
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/114930]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Li, XX,Lee, DW. Integrated microcantilevers for high-resolution sensing and probing[J]. MEASUREMENT SCIENCE & TECHNOLOGY,2012,23(2):22001.
APA	Li, XX,&Lee, DW.(2012).Integrated microcantilevers for high-resolution sensing and probing.MEASUREMENT SCIENCE & TECHNOLOGY,23(2),22001.
MLA	Li, XX,et al."Integrated microcantilevers for high-resolution sensing and probing".MEASUREMENT SCIENCE & TECHNOLOGY 23.2(2012):22001.