Numerical Simulations on Nanosecond Pulse Laser Annealing in Vertical Polycrystalline Si Macaroni Channel | |
Ma, Fushuai; Zhan, Xuepeng; Li, Yuan; Chen, Jiezhi | |
2018 | |
会议名称 | 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) |
会议日期 | OCT 31-NOV 03, 2018 |
页码 | 371-373 |
收录类别 | CPCI-S |
会议录 | 2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT) |
URL标识 | 查看原文 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/6027722 |
专题 | 山东大学 |
作者单位 | Shandong Univ, Sch Informat Sci & Engn, Qingdao 266237, Peoples R China. |
推荐引用方式 GB/T 7714 | Ma, Fushuai,Zhan, Xuepeng,Li, Yuan,et al. Numerical Simulations on Nanosecond Pulse Laser Annealing in Vertical Polycrystalline Si Macaroni Channel[C]. 见:14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT). OCT 31-NOV 03, 2018. |
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