| Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition | |
| Yu, W[1]; Lu, WB[2]; Han, L[3]; Fu, GS[4] | |
| 刊名 | JOURNAL OF PHYSICS D-APPLIED PHYSICS
 |
| 2004 | |
| 卷号 | 37期号:23页码:3304-3308 |
| ISSN号 | 0022-3727 |
| DOI | http://dx.doi.org/10.1088/0022-3727/37/23/012 |
| URL标识 | 查看原文 |
| 收录类别 | SCI(E) |
| WOS记录号 | WOS:000225915200015 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5998207 |
| 专题 | 河北大学 |
| 作者单位 | Hebei Univ, Coll Phys Sci & Technol, Baoding 071002, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Yu, W[1],Lu, WB[2],Han, L[3],et al. Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2004,37(23):3304-3308. |
| APA | Yu, W[1],Lu, WB[2],Han, L[3],&Fu, GS[4].(2004).Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition.JOURNAL OF PHYSICS D-APPLIED PHYSICS,37(23),3304-3308. |
| MLA | Yu, W[1],et al."Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition".JOURNAL OF PHYSICS D-APPLIED PHYSICS 37.23(2004):3304-3308. |
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