| The design and experiment of ion generator power supply for vacuum sputtering | |
| Chen, Wen-Guang*; Rao, Yi-Hua; Shan, Chang-Hong; Fujita, Goro; Yasutoshi, Takemoto | |
| 2007 | |
| 会议名称 | 4th Power Conversion Conference (PCC-Nagoya 2007) |
| 会议日期 | APR 02-05, 2007 |
| 会议地点 | Nagoya, JAPAN |
| 关键词 | phase-shift PWM resonant inverter soft switching ion assistant sputtering |
| 页码 | 902-+ |
| 会议录 | 2007 POWER CONVERSION CONFERENCE - NAGOYA, VOLS 1-3
 |
| URL标识 | 查看原文 |
| WOS记录号 | WOS:000250405500142 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5688672 |
| 专题 | 南华大学 |
| 作者单位 | 1.[Rao, Yi-Hua 2.Chen, Wen-Guang 3.Shan, Chang-Hong] Nanhua Univ, Dept Elect Engn, Hengyang 421001, Hunan Province, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Chen, Wen-Guang*,Rao, Yi-Hua,Shan, Chang-Hong,et al. The design and experiment of ion generator power supply for vacuum sputtering[C]. 见:4th Power Conversion Conference (PCC-Nagoya 2007). Nagoya, JAPAN. APR 02-05, 2007. |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论