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	Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma
	Li, Xiao-Song; Bi, Zhen-Hua; Chang, Da-Lei; Li, Zhi-Cheng; Wang, Shuai; Xu, Xiang; Xu, Yong; Lu, Wen-Qi; Zhu, Ai-Min; Wang, You-Nian
刊名	APPLIED PHYSICS LETTERS
	2008
卷号	93
ISSN号	0003-6951
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5607900
专题	大连理工大学
作者单位	Dalian Univ Technol, Sch Phys & Optoelect Technol, State Key Lab Mat Modificat Beams, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Li, Xiao-Song,Bi, Zhen-Hua,Chang, Da-Lei,et al. Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma[J]. APPLIED PHYSICS LETTERS,2008,93.
APA	Li, Xiao-Song.,Bi, Zhen-Hua.,Chang, Da-Lei.,Li, Zhi-Cheng.,Wang, Shuai.,...&Wang, You-Nian.(2008).Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma.APPLIED PHYSICS LETTERS,93.
MLA	Li, Xiao-Song,et al."Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma".APPLIED PHYSICS LETTERS 93(2008).

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