| Frequency matching effects on characteristics of bulk plasmas and sheaths for dual-frequency capacitively coupled argon discharges: One-dimensional fluid simulation | |
| Wang Shuai; Xu Xiang; Song Yuanhong; Wang Younian | |
| 刊名 | PLASMA SCIENCE & TECHNOLOGY
 |
| 2008 | |
| 卷号 | 10页码:57-60 |
| 关键词 | capacitively coupled plasmas dual frequency hydrodynamics sheath |
| ISSN号 | 1009-0630 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5605935 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Beams, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Wang Shuai,Xu Xiang,Song Yuanhong,et al. Frequency matching effects on characteristics of bulk plasmas and sheaths for dual-frequency capacitively coupled argon discharges: One-dimensional fluid simulation[J]. PLASMA SCIENCE & TECHNOLOGY,2008,10:57-60. |
| APA | Wang Shuai,Xu Xiang,Song Yuanhong,&Wang Younian.(2008).Frequency matching effects on characteristics of bulk plasmas and sheaths for dual-frequency capacitively coupled argon discharges: One-dimensional fluid simulation.PLASMA SCIENCE & TECHNOLOGY,10,57-60. |
| MLA | Wang Shuai,et al."Frequency matching effects on characteristics of bulk plasmas and sheaths for dual-frequency capacitively coupled argon discharges: One-dimensional fluid simulation".PLASMA SCIENCE & TECHNOLOGY 10(2008):57-60. |
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