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	Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering
	Peng, Yinqiao[1]; Zhou, Jicheng[2]; Gong, Jiehong[3]; Yu, Qinrong[3]
	2014
卷号	131页码:148
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5483013
专题	广东海洋大学
作者单位	1.[1]GuangDong Ocean Univ, Coll Informat, Zhanjiang 524088, Peoples R China 2.[2]Cent S Univ, Sch Energy Sci & Engn, Changsha 410083, Hunan, Peoples R China 3.[3]China Elect Technol Grp Corp, Res Inst 48, Changsha 410111, Hunan, Peoples R China
推荐引用方式 GB/T 7714	Peng, Yinqiao[1],Zhou, Jicheng[2],Gong, Jiehong[3],et al. Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering[J],2014,131:148.
APA	Peng, Yinqiao[1],Zhou, Jicheng[2],Gong, Jiehong[3],&Yu, Qinrong[3].(2014).Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering.,131,148.
MLA	Peng, Yinqiao[1],et al."Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering".131(2014):148.

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