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	Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering
	Peng, Yinqiao[1,2]; Zhou, Jicheng[1]; Zhao, Baoxing[1]; Tan, Xiaochao[1]; Zhang, Zhichao[1]
	2011
卷号	257期号:9页码:4010
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5479754
专题	广东海洋大学
作者单位	1.[1]Cent S Univ, Changsha 410083, Peoples R China 2.[2]GuangDong Ocean Univ, Coll Informat, Zhanjiang 524088, Peoples R China
推荐引用方式 GB/T 7714	Peng, Yinqiao[1,2],Zhou, Jicheng[1],Zhao, Baoxing[1],et al. Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering[J],2011,257(9):4010.
APA	Peng, Yinqiao[1,2],Zhou, Jicheng[1],Zhao, Baoxing[1],Tan, Xiaochao[1],&Zhang, Zhichao[1].(2011).Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering.,257(9),4010.
MLA	Peng, Yinqiao[1,2],et al."Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering".257.9(2011):4010.

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