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	Fast Formation of Silicon Nanopore Array by Low-Dose Focused Ion Beam Raster Scanning Guided Anodization
	Wang, Minchang[1]; Ge, Daohan[2]; Wang, Jingjie[3]; Qin, Song[4]; Jiao, Jiwei[5]
刊名	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
	2016
卷号	16期号:9页码:9930-9935
关键词	Nanopore Array Anodic Etching Focused Ion Beam Raster Scanning
ISSN号	1533-4880
DOI	http://dx.doi.org/10.1166/jnn.2016.12148
URL标识	查看原文
收录类别	SCI(E) ; EI
WOS记录号	WOS:000387085000132
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5371995
专题	江苏大学
作者单位	[1]State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China |University of Chinese Academy of Sciences, Beijing, 100049, China [2]School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China [3]State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China |Department of Chemistry, College of Science, Shanghai University, Shanghai, 200444, China[4]State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China |University of Chinese Academy of Sciences, Beijing, 100049, China [5]State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
推荐引用方式 GB/T 7714	Wang, Minchang[1],Ge, Daohan[2],Wang, Jingjie[3],et al. Fast Formation of Silicon Nanopore Array by Low-Dose Focused Ion Beam Raster Scanning Guided Anodization[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016,16(9):9930-9935.
APA	Wang, Minchang[1],Ge, Daohan[2],Wang, Jingjie[3],Qin, Song[4],&Jiao, Jiwei[5].(2016).Fast Formation of Silicon Nanopore Array by Low-Dose Focused Ion Beam Raster Scanning Guided Anodization.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,16(9),9930-9935.
MLA	Wang, Minchang[1],et al."Fast Formation of Silicon Nanopore Array by Low-Dose Focused Ion Beam Raster Scanning Guided Anodization".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 16.9(2016):9930-9935.

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