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	Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon
	Zhu, Hao[1]; Zhang, Zhaoyang[2]; Xu, Kun[3]; Xu, Jinlei[4]; Zhu, Shuaijie[5]; Wang, Anbin[6]; Qi, Huan[7]
刊名	MATERIALS
	2019
卷号	12期号:1
关键词	micro-trepanning single crystalline silicon picosecond laser chemical-assisted laser-material interaction material removal mechanism
ISSN号	1996-1944
DOI	http://dx.doi.org/10.3390/ma12010041
URL标识	查看原文
收录类别	SCI(E) ; PUBMED
WOS记录号	WOS:000456410200041
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5325190
专题	江苏大学
作者单位	1.[1]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Peoples R China. 2.[2]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Peoples R China. 3.[3]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Peoples R China. 4.[4]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Peoples R China. 5.[5]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Peoples R China. 6.[6]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Peoples R China. 7.[7]Zhejiang Univ Technol, Minist Educ & Zhejiang Prov, Key Lab Special Purpose Equipment & Adv Proc Tech, Hangzhou 310014, Zhejiang, Peoples R China.
推荐引用方式 GB/T 7714	Zhu, Hao[1],Zhang, Zhaoyang[2],Xu, Kun[3],et al. Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon[J]. MATERIALS,2019,12(1).
APA	Zhu, Hao[1].,Zhang, Zhaoyang[2].,Xu, Kun[3].,Xu, Jinlei[4].,Zhu, Shuaijie[5].,...&Qi, Huan[7].(2019).Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon.MATERIALS,12(1).
MLA	Zhu, Hao[1],et al."Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon".MATERIALS 12.1(2019).

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