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	Semitransparent optical detector on a flexible substrate and method of making
	WAGNER, SIGURD; WAGNER, MATTHIAS; MA, EUGENE Y.; PAYNE, ADAM M.
	2003-12-30
著作权人	II-VI PHOTONICS, (US) INC.
专利号	US6670599
国家	美国
文献子类	授权发明
其他题名	Semitransparent optical detector on a flexible substrate and method of making
英文摘要	Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.
公开日期	2003-12-30
申请日期	2001-03-20
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/40369]
专题	半导体激光器专利数据库
作者单位	II-VI PHOTONICS, (US) INC.
推荐引用方式 GB/T 7714	WAGNER, SIGURD,WAGNER, MATTHIAS,MA, EUGENE Y.,et al. Semitransparent optical detector on a flexible substrate and method of making. US6670599. 2003-12-30.

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