Method for fabricating light emitting semiconductor device for reducing defects of dislocation in the device | |
HUANG, SHIH CHENG; TU, PO MIN; YEH, YING CHAO; LIN, WEN YU; WU, PENG YI; CHAN, SHIH HSIUNG | |
2012-06-19 | |
著作权人 | ADVANCED OPTOELECTRONIC TECHNOLOGY INC. |
专利号 | US8202752 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Method for fabricating light emitting semiconductor device for reducing defects of dislocation in the device |
英文摘要 | A semiconductor device fabrication method is disclosed. A buffer layer is provided and a first semiconductor layer is formed on the buffer layer. Next, a first intermediate layer is formed on the first semiconductor layer by dopant with high concentration during an epitaxial process. A second semiconductor layer is overlaid on the first intermediate layer. A semiconductor light emitting device is grown on the second semiconductor layer. The formation of the intermediate layer and the second semiconductor layer is a set of steps. |
公开日期 | 2012-06-19 |
申请日期 | 2009-06-22 |
状态 | 授权 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/38501] |
专题 | 半导体激光器专利数据库 |
作者单位 | ADVANCED OPTOELECTRONIC TECHNOLOGY INC. |
推荐引用方式 GB/T 7714 | HUANG, SHIH CHENG,TU, PO MIN,YEH, YING CHAO,et al. Method for fabricating light emitting semiconductor device for reducing defects of dislocation in the device. US8202752. 2012-06-19. |
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