Method for fabricating light emitting semiconductor device for reducing defects of dislocation in the device
HUANG, SHIH CHENG; TU, PO MIN; YEH, YING CHAO; LIN, WEN YU; WU, PENG YI; CHAN, SHIH HSIUNG
2012-06-19
著作权人ADVANCED OPTOELECTRONIC TECHNOLOGY INC.
专利号US8202752
国家美国
文献子类授权发明
其他题名Method for fabricating light emitting semiconductor device for reducing defects of dislocation in the device
英文摘要A semiconductor device fabrication method is disclosed. A buffer layer is provided and a first semiconductor layer is formed on the buffer layer. Next, a first intermediate layer is formed on the first semiconductor layer by dopant with high concentration during an epitaxial process. A second semiconductor layer is overlaid on the first intermediate layer. A semiconductor light emitting device is grown on the second semiconductor layer. The formation of the intermediate layer and the second semiconductor layer is a set of steps.
公开日期2012-06-19
申请日期2009-06-22
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/38501]  
专题半导体激光器专利数据库
作者单位ADVANCED OPTOELECTRONIC TECHNOLOGY INC.
推荐引用方式
GB/T 7714
HUANG, SHIH CHENG,TU, PO MIN,YEH, YING CHAO,et al. Method for fabricating light emitting semiconductor device for reducing defects of dislocation in the device. US8202752. 2012-06-19.
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