Mask controlled coupling of inter-substrate optical components
HUANG, ALAN; JAHNS, JÜRGEN
1995-11-02
著作权人AT&T CORP.
专利号EP0394866B1
国家欧洲专利局
文献子类授权发明
其他题名Mask controlled coupling of inter-substrate optical components
英文摘要Alignment difficulties in optical computing arrangements are overcome by integrating the optical components on a single substrate and arranging the elements in a manner that causes them to interact with one another to perform the desired function. The substrate has one or two major surfaces and the elements are grown or fabricated on those surfaces using conventional integrated circuit manufacturing techniques. Recognizing that an optical circuit can be larger than what can be fabricated on a single substrate, aligning structures are fabricated onto substrates that need to be coupled to form the optical circuit. The aligning structures contain registrable protrusion and indentation portions, such as ridges and grooves, that are imbedded into the substrates as part of the manufacturing process of the optical elements. Most advantageously, the position-sensitive optical devices are manufactured on one side.
公开日期1995-11-02
申请日期1990-04-20
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/35976]  
专题半导体激光器专利数据库
作者单位AT&T CORP.
推荐引用方式
GB/T 7714
HUANG, ALAN,JAHNS, JÜRGEN. Mask controlled coupling of inter-substrate optical components. EP0394866B1. 1995-11-02.
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