Method for manufacturing a semiconductor device using a circuit transfer film
SPITZER, MARK B.; SALERNO, JACK P.; JACOBSEN, JEFFREY; DINGLE, BRENDA; VU, DUY-PHACH; ZAVRACKY, PAUL M.
1993-11-02
著作权人KOPIN CORPORATION
专利号US5258325
国家美国
文献子类授权发明
其他题名Method for manufacturing a semiconductor device using a circuit transfer film
英文摘要The invention relates to device processing, packaging and interconnects that will yield integrated electronic circuitry of high density and complexity. Processes include the formation of complex multi-function circuitry on common module substrates using circuit tiles of silicon thin-films which are transferred, interconnected and packaged. Circuit modules using integrated transfer/interconnect processes compatible with extremely high density and complexity provide large-area active-matrix displays with on-board drivers and logic in modules.
公开日期1993-11-02
申请日期1992-02-13
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/33396]  
专题半导体激光器专利数据库
作者单位KOPIN CORPORATION
推荐引用方式
GB/T 7714
SPITZER, MARK B.,SALERNO, JACK P.,JACOBSEN, JEFFREY,et al. Method for manufacturing a semiconductor device using a circuit transfer film. US5258325. 1993-11-02.
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