| Design of Bias Power Supply for Magnetron Sputtering with Automatic Equalization Current | |
| Huang, Xiping; Chen, Guitao; Nie, Yanlin | |
| 2017 | |
| 会议名称 | PROCEEDINGS OF THE 2017 INTERNATIONAL CONFERENCE ON ELECTRONIC INDUSTRY AND AUTOMATION (EIA 2017) |
| 会议日期 | 2017-01-01 |
| 关键词 | Bias power supply for magnetron sputtering (BPSMS) Combined full bridge Crossed rectification Automatic equalization current (AEC) |
| 页码 | 199-203 |
| URL标识 | 查看原文 |
| WOS记录号 | WOS:000426685000043 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4980295 |
| 专题 | 西安理工大学 |
| 推荐引用方式 GB/T 7714 | Huang, Xiping,Chen, Guitao,Nie, Yanlin. Design of Bias Power Supply for Magnetron Sputtering with Automatic Equalization Current[C]. 见:PROCEEDINGS OF THE 2017 INTERNATIONAL CONFERENCE ON ELECTRONIC INDUSTRY AND AUTOMATION (EIA 2017). 2017-01-01. |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论