| Coupled Electro-Thermal-Mechanical Micro-hotplate-based for Micro Gas Pressure Sensor | |
| Jin, Rencheng; Shao, Mingliang; Meng, Lisha; Tang, Zhenan; Wang, Jiaqi | |
| 2011 | |
| 会议名称 | International Conference on Industry, Information System and Material Engineering |
| 会议日期 | 2011-04-16 |
| 会议地点 | Guangzhou, PEOPLES R CHINA |
| 关键词 | micro pressure sensor micro hot plate coupling analysis electro-thermal-mechanical Coupled |
| 页码 | 1086-+ |
| 会议录 | International Conference on Industry, Information System and Material Engineering
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| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4842473 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Key Lab Microsyst & Microfabricating Technol, Dalian, Peoples R China. 2.Dalian Univ Technol, Dept Elect Engn, Dalian, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Jin, Rencheng,Shao, Mingliang,Meng, Lisha,et al. Coupled Electro-Thermal-Mechanical Micro-hotplate-based for Micro Gas Pressure Sensor[C]. 见:International Conference on Industry, Information System and Material Engineering. Guangzhou, PEOPLES R CHINA. 2011-04-16. |
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