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	Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating
	Zhao, Yanhui; Lin, Guoqiang; Xiao, Jinquan; Lang, Wenchang; Dong, Chuang; Gong, Jun; Sun, Chao
刊名	APPLIED SURFACE SCIENCE
	2011
卷号	257页码:5694-5697
关键词	Shielded arc ion plating TiN Thin films Deposition rate Droplet particles Adhesion
ISSN号	0169-4332
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4839103
专题	大连理工大学
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China. 2.Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Zhao, Yanhui,Lin, Guoqiang,Xiao, Jinquan,et al. Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating[J]. APPLIED SURFACE SCIENCE,2011,257:5694-5697.
APA	Zhao, Yanhui.,Lin, Guoqiang.,Xiao, Jinquan.,Lang, Wenchang.,Dong, Chuang.,...&Sun, Chao.(2011).Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating.APPLIED SURFACE SCIENCE,257,5694-5697.
MLA	Zhao, Yanhui,et al."Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating".APPLIED SURFACE SCIENCE 257(2011):5694-5697.

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