QQ客服 官方微博 反馈留言

	Ti/TiN multilayer thin films deposited by pulse biased arc ion plating
	Zhao, Yanhui; Lin, Guoqiang; Xiao, Jinquan; Du, Hao; Dong, Chuang; Gao, Lijun
刊名	APPLIED SURFACE SCIENCE
	2011
卷号	257页码:2683-2688
关键词	Multilayer films Pulse biased arc ion plating Hardness Adhesion
ISSN号	0169-4332
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4838172
专题	大连理工大学
作者单位	1.Chinese Acad Sci, Specialized Mat & Devices Div, Dept Surface Engn, Inst Met Res, Shenyang 110016, Peoples R China. 2.Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China. 3.Chinese Acad Sci, Specialized Mat & Devices Div, Dept Surface Engn, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China.
推荐引用方式 GB/T 7714	Zhao, Yanhui,Lin, Guoqiang,Xiao, Jinquan,et al. Ti/TiN multilayer thin films deposited by pulse biased arc ion plating[J]. APPLIED SURFACE SCIENCE,2011,257:2683-2688.
APA	Zhao, Yanhui,Lin, Guoqiang,Xiao, Jinquan,Du, Hao,Dong, Chuang,&Gao, Lijun.(2011).Ti/TiN multilayer thin films deposited by pulse biased arc ion plating.APPLIED SURFACE SCIENCE,257,2683-2688.
MLA	Zhao, Yanhui,et al."Ti/TiN multilayer thin films deposited by pulse biased arc ion plating".APPLIED SURFACE SCIENCE 257(2011):2683-2688.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。