| Ridge waveguide fabrication by combining ion implantation and precise a dicing on a LiNbO3 crystal | |
| Zhou, Yu-Fan; Wang, Lei; Liu, Peng; Liu, Tao; Zhang, Lian; Huang, Dong-Ting; Wang, Xue-Lin | |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 2014 | |
| 卷号 | 326页码:110-112 |
| 关键词 | LiNbO3 crystal Ion implantation Ridge optical waveguide Precise diamond blade dicing |
| DOI | 10.1016/j.nimb.2013.09.037 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4804064 |
| 专题 | 山东大学 |
| 作者单位 | 1.Shandong Univ, Sch Phys, State Key Lab Crystal Mat, Jinan 250100, Peoples R China. 2.Shandong Univ, MOE, Key Lab Particle Phys & Part |
| 推荐引用方式 GB/T 7714 | Zhou, Yu-Fan,Wang, Lei,Liu, Peng,et al. Ridge waveguide fabrication by combining ion implantation and precise a dicing on a LiNbO3 crystal[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2014,326:110-112. |
| APA | Zhou, Yu-Fan.,Wang, Lei.,Liu, Peng.,Liu, Tao.,Zhang, Lian.,...&Wang, Xue-Lin.(2014).Ridge waveguide fabrication by combining ion implantation and precise a dicing on a LiNbO3 crystal.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,326,110-112. |
| MLA | Zhou, Yu-Fan,et al."Ridge waveguide fabrication by combining ion implantation and precise a dicing on a LiNbO3 crystal".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 326(2014):110-112. |
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