| Ridge waveguide fabrication by combining ion implantation and precise dicing on a LiNbO_3 crystal | |
| Yu-Fan Zhou; Lei Wang; Peng Liu; Tao Liu; Lian Zhang; Dong-Ting Huang; Xue-Lin Wang | |
| 刊名 | Nuclear Instruments and Methods in Physics Research, Section B. Beam Interactions with Materials and Atoms
 |
| 2014 | |
| 页码 | 110-112 |
| 关键词 | LiNbO_3 crystal Ion implantation Ridge optical waveguide Precise diamond blade dicing |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4795625 |
| 专题 | 山东大学 |
| 作者单位 | School of Physics, State Key Laboratory of Crystal Materials and Key Laboratory of Particle Physics and Particle Irradiation (MO |
| 推荐引用方式 GB/T 7714 | Yu-Fan Zhou,Lei Wang,Peng Liu,et al. Ridge waveguide fabrication by combining ion implantation and precise dicing on a LiNbO_3 crystal[J]. Nuclear Instruments and Methods in Physics Research, Section B. Beam Interactions with Materials and Atoms,2014:110-112. |
| APA | Yu-Fan Zhou.,Lei Wang.,Peng Liu.,Tao Liu.,Lian Zhang.,...&Xue-Lin Wang.(2014).Ridge waveguide fabrication by combining ion implantation and precise dicing on a LiNbO_3 crystal.Nuclear Instruments and Methods in Physics Research, Section B. Beam Interactions with Materials and Atoms,110-112. |
| MLA | Yu-Fan Zhou,et al."Ridge waveguide fabrication by combining ion implantation and precise dicing on a LiNbO_3 crystal".Nuclear Instruments and Methods in Physics Research, Section B. Beam Interactions with Materials and Atoms (2014):110-112. |
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