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	Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide
	Liu, Qingbo; Wang, Guilei; Guo, Yiluan; Ke, Xingxing; Liu, Hong; Zhao, Chao; Luo, Jun
刊名	VACUUM
	2015
卷号	111页码:114-118
关键词	Ni(Pt)SiGe Pt redistribution Diffusion model
DOI	10.1016/j.vacuum.2014.10.007
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4786467
专题	山东大学
作者单位	1.Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Peoples R China. 2.[Liu, Qingbo 3.Wang, Guilei 4.Guo, Yiluan 5.Ke, Xing
推荐引用方式 GB/T 7714	Liu, Qingbo,Wang, Guilei,Guo, Yiluan,et al. Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide[J]. VACUUM,2015,111:114-118.
APA	Liu, Qingbo.,Wang, Guilei.,Guo, Yiluan.,Ke, Xingxing.,Liu, Hong.,...&Luo, Jun.(2015).Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide.VACUUM,111,114-118.
MLA	Liu, Qingbo,et al."Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide".VACUUM 111(2015):114-118.

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