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Design and analysis of an X-Y parallel nanopositioner supporting large-stroke servomechanism
Liu, Pengbo; Yan, Peng; Zhang, Zhen
刊名Proceedings of the Institution of Mechanical Engineers, Part C. Journal of mechanical engineering science
2015
卷号229期号:2页码:364-376
关键词Nanopositioner compliant mechanism flexure stage mechatronics piezoelectric actuator
DOI10.1177/0954406214533103
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4779519
专题山东大学
作者单位Key Laboratory of High-Efficiency and Clean Mechanical Manufacturing, School of Mechanical Engineering, Shandong University, Jinan, Shandong,
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GB/T 7714
Liu, Pengbo,Yan, Peng,Zhang, Zhen. Design and analysis of an X-Y parallel nanopositioner supporting large-stroke servomechanism[J]. Proceedings of the Institution of Mechanical Engineers, Part C. Journal of mechanical engineering science,2015,229(2):364-376.
APA Liu, Pengbo,Yan, Peng,&Zhang, Zhen.(2015).Design and analysis of an X-Y parallel nanopositioner supporting large-stroke servomechanism.Proceedings of the Institution of Mechanical Engineers, Part C. Journal of mechanical engineering science,229(2),364-376.
MLA Liu, Pengbo,et al."Design and analysis of an X-Y parallel nanopositioner supporting large-stroke servomechanism".Proceedings of the Institution of Mechanical Engineers, Part C. Journal of mechanical engineering science 229.2(2015):364-376.
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