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	Study on reactive sputtering of yttrium oxide: Process and thin film properties
	Lei, Pei; Leroy, Wouter; Dai, Bing; Zhu, Jiaqi; Chen, Xiaoting; Han, Jiecai; Depla, Diederik
刊名	SURFACE & COATINGS TECHNOLOGY
	2015
卷号	276页码:39-46
关键词	DC magnetron sputtering Yttrium oxide thin films Microstructure Optical properties Mechanical properties
DOI	10.1016/j.surfcoat.2015.06.052
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4776766
专题	山东大学
作者单位	1.Harbin Inst Technol, Ctr Composite Mat, Harbin 150080, Peoples R China. 2.[Leroy, Wouter 3.Depla, Diede
推荐引用方式 GB/T 7714	Lei, Pei,Leroy, Wouter,Dai, Bing,et al. Study on reactive sputtering of yttrium oxide: Process and thin film properties[J]. SURFACE & COATINGS TECHNOLOGY,2015,276:39-46.
APA	Lei, Pei.,Leroy, Wouter.,Dai, Bing.,Zhu, Jiaqi.,Chen, Xiaoting.,...&Depla, Diederik.(2015).Study on reactive sputtering of yttrium oxide: Process and thin film properties.SURFACE & COATINGS TECHNOLOGY,276,39-46.
MLA	Lei, Pei,et al."Study on reactive sputtering of yttrium oxide: Process and thin film properties".SURFACE & COATINGS TECHNOLOGY 276(2015):39-46.

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