Visualized strain profile in the process of crystal ion slicing of LiTaO3 | |
Ma, Changdong; Lu, Fei; Xu, Bo; Fan, Ranran | |
刊名 | JOURNAL OF PHYSICS D-APPLIED PHYSICS
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2016 | |
卷号 | 49期号:20 |
关键词 | LiTaO3 crystal ion co-implantation strain profile lattice damage |
DOI | 10.1088/0022-3727/49/20/205301 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4760646 |
专题 | 山东大学 |
作者单位 | Shandong Univ, Sch Informat Sci & Engn, Jinan 250100, Shandong, Peoples R China. |
推荐引用方式 GB/T 7714 | Ma, Changdong,Lu, Fei,Xu, Bo,et al. Visualized strain profile in the process of crystal ion slicing of LiTaO3[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2016,49(20). |
APA | Ma, Changdong,Lu, Fei,Xu, Bo,&Fan, Ranran.(2016).Visualized strain profile in the process of crystal ion slicing of LiTaO3.JOURNAL OF PHYSICS D-APPLIED PHYSICS,49(20). |
MLA | Ma, Changdong,et al."Visualized strain profile in the process of crystal ion slicing of LiTaO3".JOURNAL OF PHYSICS D-APPLIED PHYSICS 49.20(2016). |
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