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Reduced reverse gate leakage current for GaN HEMTs with 3 nm Al/40 nm SiN passivation layer
Zhang, Sheng; Wei, Ke; Ma, Xiao-Hua; Hou, Bin; Liu, Guo-Guo; Zhang, Yi-chuan; Wang, Xin-Hua; Zheng, Ying-Kui; Huang, Sen; Li, Yan-Kui
刊名APPLIED PHYSICS LETTERS
2019
卷号Vol.114 No.1
ISSN号0003-6951
URL标识查看原文
公开日期[db:dc_date_available]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4744742
专题湖南大学
作者单位1.Xidian Univ, Sch Adv Mat & Nanotechnol, Xian 710071, Shaanxi, Peoples R China
2.Chinese Acad Sci, Inst Microelect, High Frequency High Voltage Device & Integrated C, Beijing 100029, Peoples R China
推荐引用方式
GB/T 7714
Zhang, Sheng,Wei, Ke,Ma, Xiao-Hua,et al. Reduced reverse gate leakage current for GaN HEMTs with 3 nm Al/40 nm SiN passivation layer[J]. APPLIED PHYSICS LETTERS,2019,Vol.114 No.1.
APA Zhang, Sheng.,Wei, Ke.,Ma, Xiao-Hua.,Hou, Bin.,Liu, Guo-Guo.,...&Li, Yan-Kui.(2019).Reduced reverse gate leakage current for GaN HEMTs with 3 nm Al/40 nm SiN passivation layer.APPLIED PHYSICS LETTERS,Vol.114 No.1.
MLA Zhang, Sheng,et al."Reduced reverse gate leakage current for GaN HEMTs with 3 nm Al/40 nm SiN passivation layer".APPLIED PHYSICS LETTERS Vol.114 No.1(2019).
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