| Low-Cost Plate-Type MOEMS Uniaxial Vibration Sensor Based on Metal Etching and Fiber Collimator Technique | |
| Jiang, Shanchao; Wang, Jing; Sui, Qingmei; Ye, Qinglin | |
| 刊名 | IEEE SENSORS JOURNAL
 |
| 2016 | |
| 卷号 | 16期号:12页码:4816-4821 |
| 关键词 | MOEMS metal etching vibration sensor resonant frequency |
| DOI | 10.1109/JSEN.2016.2555927 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4707374 |
| 专题 | 山东大学 |
| 作者单位 | Yancheng Inst Technol, Sch Elect Engn, Yancheng 224051, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Jiang, Shanchao,Wang, Jing,Sui, Qingmei,et al. Low-Cost Plate-Type MOEMS Uniaxial Vibration Sensor Based on Metal Etching and Fiber Collimator Technique[J]. IEEE SENSORS JOURNAL,2016,16(12):4816-4821. |
| APA | Jiang, Shanchao,Wang, Jing,Sui, Qingmei,&Ye, Qinglin.(2016).Low-Cost Plate-Type MOEMS Uniaxial Vibration Sensor Based on Metal Etching and Fiber Collimator Technique.IEEE SENSORS JOURNAL,16(12),4816-4821. |
| MLA | Jiang, Shanchao,et al."Low-Cost Plate-Type MOEMS Uniaxial Vibration Sensor Based on Metal Etching and Fiber Collimator Technique".IEEE SENSORS JOURNAL 16.12(2016):4816-4821. |
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