| The High Q Factor Lateral Field-Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid | |
| Chen, Da; Ren, Wenwen; Song, Shuren; Wang, Jingjing; Liu, Weihui; Wang, Peng | |
| 刊名 | MICROMACHINES
 |
| 2016 | |
| 卷号 | 7期号:12 |
| 关键词 | film bulk acoustic resonator thickness shear mode finite element method |
| DOI | 10.3390/mi7120231 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4703545 |
| 专题 | 山东大学 |
| 作者单位 | 1.Shandong Univ Sci & Technol, State Key Lab Min Disaster Prevent & Control Cofo, Qingdao 266590, Peoples R China. 2.Shandong Uni |
| 推荐引用方式 GB/T 7714 | Chen, Da,Ren, Wenwen,Song, Shuren,et al. The High Q Factor Lateral Field-Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid[J]. MICROMACHINES,2016,7(12). |
| APA | Chen, Da,Ren, Wenwen,Song, Shuren,Wang, Jingjing,Liu, Weihui,&Wang, Peng.(2016).The High Q Factor Lateral Field-Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid.MICROMACHINES,7(12). |
| MLA | Chen, Da,et al."The High Q Factor Lateral Field-Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid".MICROMACHINES 7.12(2016). |
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