Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography | |
Zhao, Dongfang; Gao, Naikun; Jia, Ran; Zhang, Ling; Yan, Weishan; Liu, Duo | |
刊名 | RSC ADVANCES |
2016 | |
卷号 | 6期号:50页码:44057-44061 |
DOI | 10.1039/c6ra07093k |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4695210 |
专题 | 山东大学 |
作者单位 | Shandong Univ, State Key Lab Crystal Mat, 27 South Shanda Rd, Jinan 25010 |
推荐引用方式 GB/T 7714 | Zhao, Dongfang,Gao, Naikun,Jia, Ran,et al. Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography[J]. RSC ADVANCES,2016,6(50):44057-44061. |
APA | Zhao, Dongfang,Gao, Naikun,Jia, Ran,Zhang, Ling,Yan, Weishan,&Liu, Duo.(2016).Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography.RSC ADVANCES,6(50),44057-44061. |
MLA | Zhao, Dongfang,et al."Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography".RSC ADVANCES 6.50(2016):44057-44061. |
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