Analytical solution of squeeze film and thermoelastic damping in bulk resonators | |
Yuanlong Cao; Ke Yu; Kai Feng; Hanqing Guan; Yihua Wu; Kai Zhang | |
刊名 | Sensors and Actuators A: Physical |
2019 | |
卷号 | Vol.297页码:111530 |
关键词 | MEMS Squeeze film damping Thermoelastic damping Quality factor Improved Fourier series method |
ISSN号 | 0924-4247 |
URL标识 | 查看原文 |
公开日期 | [db:dc_date_available] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4614374 |
专题 | 湖南大学 |
作者单位 | State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University, Changsha, 410082, China |
推荐引用方式 GB/T 7714 | Yuanlong Cao,Ke Yu,Kai Feng,et al. Analytical solution of squeeze film and thermoelastic damping in bulk resonators[J]. Sensors and Actuators A: Physical,2019,Vol.297:111530. |
APA | Yuanlong Cao,Ke Yu,Kai Feng,Hanqing Guan,Yihua Wu,&Kai Zhang.(2019).Analytical solution of squeeze film and thermoelastic damping in bulk resonators.Sensors and Actuators A: Physical,Vol.297,111530. |
MLA | Yuanlong Cao,et al."Analytical solution of squeeze film and thermoelastic damping in bulk resonators".Sensors and Actuators A: Physical Vol.297(2019):111530. |
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