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	Long lifecycle MEMS double-clamped beam based on low stress graphene compound film
	Ting Zhang; Jing-Fu Bao; Rong-Zhou Zeng; Yang Yang; Lei-Lei Bao; Fei-Hong Bao; Yi Zhang; Feng Qin
刊名	Sensors and Actuators A: Physical
	2019
关键词	MEMS Graphene Double-clamped beam Residual stress long lifecycle
ISSN号	0924-4247
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4604970
专题	湖南大学
作者单位	1.a School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 61173, China 2.Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan 3.School of Electrical and Data Engineering, University of Technology Sydney, Ultimo, New South Wales 2007, Australia
推荐引用方式 GB/T 7714	Ting Zhang,Jing-Fu Bao,Rong-Zhou Zeng,et al. Long lifecycle MEMS double-clamped beam based on low stress graphene compound film[J]. Sensors and Actuators A: Physical,2019.
APA	Ting Zhang.,Jing-Fu Bao.,Rong-Zhou Zeng.,Yang Yang.,Lei-Lei Bao.,...&Feng Qin.(2019).Long lifecycle MEMS double-clamped beam based on low stress graphene compound film.Sensors and Actuators A: Physical.
MLA	Ting Zhang,et al."Long lifecycle MEMS double-clamped beam based on low stress graphene compound film".Sensors and Actuators A: Physical (2019).

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