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Fabrication of high-hole-mobility germanium-on-insulator wafers through an easy method
Yu, Kai; Yang, Fan; Cong, Hui; Zhou, Lin; Liu, Qingyun; Zhang, Lichun; Cheng, Buwen; Xue, Chunlai; Zuo, Yuhua; Li, Chuanbo
刊名JOURNAL OF ALLOYS AND COMPOUNDS
2018
卷号750页码:182-188
关键词GeOI High crystal quality Back-gate pMOSFET Field-effect hole mobility
DOI10.1016/j.jallcom.2018.02.178
URL标识查看原文
公开日期[db:dc_date_available]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4564456
专题山东大学
作者单位Chinese Acad Sci, Inst Semicond, State Key Lab Integra
推荐引用方式
GB/T 7714
Yu, Kai,Yang, Fan,Cong, Hui,et al. Fabrication of high-hole-mobility germanium-on-insulator wafers through an easy method[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2018,750:182-188.
APA Yu, Kai.,Yang, Fan.,Cong, Hui.,Zhou, Lin.,Liu, Qingyun.,...&Li, Chuanbo.(2018).Fabrication of high-hole-mobility germanium-on-insulator wafers through an easy method.JOURNAL OF ALLOYS AND COMPOUNDS,750,182-188.
MLA Yu, Kai,et al."Fabrication of high-hole-mobility germanium-on-insulator wafers through an easy method".JOURNAL OF ALLOYS AND COMPOUNDS 750(2018):182-188.
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