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	Effect of O Content on Mechanical Properties of TaN Films Prepared by PIIID
	Sun Gang; Ma Guojia; Liu Xing; Wu Hongchen; Gong Shuili
刊名	RARE METAL MATERIALS AND ENGINEERING
	2013
卷号	42页码:124-127
关键词	TaN films PIID O content
ISSN号	1002-185X
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4541879
专题	大连理工大学
作者单位	1.Beijing Aeronaut Mfg Technol Res Inst, Natl Key Lab Sci & Technol Power Beam Proc, Beijing 100024, Peoples R China. 2.Beijing Aeronaut Mfg Technol Res Inst, Natl Key Lab Sci & Technol Power Beam Proc, Beijing 100024, Peoples R China. 3.Dalian Univ Technol, Dalian 116024, Peoples R China. 4.Dalian Univ Technol, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Sun Gang,Ma Guojia,Liu Xing,et al. Effect of O Content on Mechanical Properties of TaN Films Prepared by PIIID[J]. RARE METAL MATERIALS AND ENGINEERING,2013,42:124-127.
APA	Sun Gang,Ma Guojia,Liu Xing,Wu Hongchen,&Gong Shuili.(2013).Effect of O Content on Mechanical Properties of TaN Films Prepared by PIIID.RARE METAL MATERIALS AND ENGINEERING,42,124-127.
MLA	Sun Gang,et al."Effect of O Content on Mechanical Properties of TaN Films Prepared by PIIID".RARE METAL MATERIALS AND ENGINEERING 42(2013):124-127.

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