Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery | |
Li, Yi; Zheng, Bocong; Lei, M. K. | |
刊名 | IEEE TRANSACTIONS ON PLASMA SCIENCE |
2013 | |
卷号 | 41页码:43-48 |
关键词 | Fluid model plasma-based ion implantation (PBII) plasma diffusion plasma recovery |
ISSN号 | 0093-3813 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4537503 |
专题 | 大连理工大学 |
作者单位 | 1.Dalian Univ Technol, Sch Mat Sci & Engn, Surface Engn Lab, Dalian 116024, Peoples R China. 2.Liaoning Univ Technol, Sch Sci, Jinzhou 121001, Peoples R China. 3.Dalian Univ Technol, Sch Mat Sci & Engn, Surface Engn Lab, Dalian 116024, Peoples R China. |
推荐引用方式 GB/T 7714 | Li, Yi,Zheng, Bocong,Lei, M. K.. Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2013,41:43-48. |
APA | Li, Yi,Zheng, Bocong,&Lei, M. K..(2013).Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery.IEEE TRANSACTIONS ON PLASMA SCIENCE,41,43-48. |
MLA | Li, Yi,et al."Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery".IEEE TRANSACTIONS ON PLASMA SCIENCE 41(2013):43-48. |
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