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	Local heating solidification polycrystalline silicon impurity removing device, has furnace body whose lower part is connected with graphite pedestal, and moving shaft whose lower end is connected with control device in solid state.
	JIANG D LI P LIN H TAN Y SHI S WEN
	2014
公开日期	2014-11-05
URL标识	查看原文
申请日期	2014-07-17
内容类型	专利
URI标识	http://www.corc.org.cn/handle/1471x/4516537
专题	大连理工大学
作者单位	UNIV DALIAN TECHNOLOGY (UYDA-C
推荐引用方式 GB/T 7714	JIANG D LI P LIN H TAN Y SHI S WEN. Local heating solidification polycrystalline silicon impurity removing device, has furnace body whose lower part is connected with graphite pedestal, and moving shaft whose lower end is connected with control device in solid state.. 2014-01-01.

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