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Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification
Zhang, Guiming; Zhao, Libo; Jiang, Zhuangde; Yang, Shuming; Zhao, Yulong; Huang, Enze; Hebibul, Rahman; Wang, Xiaopo; Liu, Zhigang
刊名JOURNAL OF PHYSICS D-APPLIED PHYSICS
2011
卷号44期号:[db:dc_citation_issue]
ISSN号0022-3727
DOI[db:dc_identifier_doi]
URL标识查看原文
WOS记录号[DB:DC_IDENTIFIER_WOSID]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4495889
专题西安交通大学
推荐引用方式
GB/T 7714
Zhang, Guiming,Zhao, Libo,Jiang, Zhuangde,et al. Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2011,44([db:dc_citation_issue]).
APA Zhang, Guiming.,Zhao, Libo.,Jiang, Zhuangde.,Yang, Shuming.,Zhao, Yulong.,...&Liu, Zhigang.(2011).Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification.JOURNAL OF PHYSICS D-APPLIED PHYSICS,44([db:dc_citation_issue]).
MLA Zhang, Guiming,et al."Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification".JOURNAL OF PHYSICS D-APPLIED PHYSICS 44.[db:dc_citation_issue](2011).
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