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	Study on rotation-free combined immersion magneto-electrostatic lenses
	Zhao, Jingyi; Tang, Tiantong; Kang, Yongfeng; Sun, Wenjun
刊名	OPTIK
	2012
卷号	123期号:[db:dc_citation_issue]页码:1233-1235
关键词	Rotation-free electron lenses magneto-electrostatic lenses Projection lithography systems Combined immersion
ISSN号	0030-4026
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4475451
专题	西安交通大学
推荐引用方式 GB/T 7714	Zhao, Jingyi,Tang, Tiantong,Kang, Yongfeng,et al. Study on rotation-free combined immersion magneto-electrostatic lenses[J]. OPTIK,2012,123([db:dc_citation_issue]):1233-1235.
APA	Zhao, Jingyi,Tang, Tiantong,Kang, Yongfeng,&Sun, Wenjun.(2012).Study on rotation-free combined immersion magneto-electrostatic lenses.OPTIK,123([db:dc_citation_issue]),1233-1235.
MLA	Zhao, Jingyi,et al."Study on rotation-free combined immersion magneto-electrostatic lenses".OPTIK 123.[db:dc_citation_issue](2012):1233-1235.

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