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	Prebreakdown and breakdown characteristics of micrometer gap in micro-electro-mechanical system device
	Meng, Guodong; Cheng, Yonghong; You, Xiaoguang; Wu, Kai
刊名	Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University
	2012
卷号	46期号:[db:dc_citation_issue]页码:106-110+127
关键词	Breakdown characteristics Electron avalanches Fowler-Nordheim plots Free charged particles Insulation characteristics Micro electromechanical system (MEMS) Micro electro mechanical system Paschen curves
ISSN号	0253-987X
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4455646
专题	西安交通大学
推荐引用方式 GB/T 7714	Meng, Guodong,Cheng, Yonghong,You, Xiaoguang,et al. Prebreakdown and breakdown characteristics of micrometer gap in micro-electro-mechanical system device[J]. Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University,2012,46([db:dc_citation_issue]):106-110+127.
APA	Meng, Guodong,Cheng, Yonghong,You, Xiaoguang,&Wu, Kai.(2012).Prebreakdown and breakdown characteristics of micrometer gap in micro-electro-mechanical system device.Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University,46([db:dc_citation_issue]),106-110+127.
MLA	Meng, Guodong,et al."Prebreakdown and breakdown characteristics of micrometer gap in micro-electro-mechanical system device".Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University 46.[db:dc_citation_issue](2012):106-110+127.

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