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Development of novel type of 172 nm vacuum ultraviolet light source
Liu, Zhen; Guo, Xin; Bu, Renan
刊名Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
2012
卷号32期号:[db:dc_citation_issue]页码:1114-1118
关键词Driving voltages High emission intensity Ignition voltage Input power Its efficiencies Light emission intensity Magnesium fluoride Operating condition Pulse waveforms Sinusoidal voltage Square pulse Structure design Vacuum ultraviolet Light Vacuum ultraviolets Wave forms
ISSN号1672-7126
DOI[db:dc_identifier_doi]
URL标识查看原文
WOS记录号[DB:DC_IDENTIFIER_WOSID]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4455595
专题西安交通大学
推荐引用方式
GB/T 7714
Liu, Zhen,Guo, Xin,Bu, Renan. Development of novel type of 172 nm vacuum ultraviolet light source[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2012,32([db:dc_citation_issue]):1114-1118.
APA Liu, Zhen,Guo, Xin,&Bu, Renan.(2012).Development of novel type of 172 nm vacuum ultraviolet light source.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,32([db:dc_citation_issue]),1114-1118.
MLA Liu, Zhen,et al."Development of novel type of 172 nm vacuum ultraviolet light source".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 32.[db:dc_citation_issue](2012):1114-1118.
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