Microstructures and emission characteristics of porous silicon films | |
Luo, Wen; Hu, Wenbo; Zheng, Yu; Song, Zhongxiao; Wu, Huiyan | |
刊名 | Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology |
2012 | |
卷号 | 32期号:[db:dc_citation_issue]页码:30-35 |
关键词 | Cold cathodes Doping levels Emission characteristics Emission current Etching condition Etching time Field emission scanning electron microscopy High density Low pressures N type silicon Porous si Porous silicon films Si wafer |
ISSN号 | 1672-7126 |
DOI | [db:dc_identifier_doi] |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4455592 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Luo, Wen,Hu, Wenbo,Zheng, Yu,et al. Microstructures and emission characteristics of porous silicon films[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2012,32([db:dc_citation_issue]):30-35. |
APA | Luo, Wen,Hu, Wenbo,Zheng, Yu,Song, Zhongxiao,&Wu, Huiyan.(2012).Microstructures and emission characteristics of porous silicon films.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,32([db:dc_citation_issue]),30-35. |
MLA | Luo, Wen,et al."Microstructures and emission characteristics of porous silicon films".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 32.[db:dc_citation_issue](2012):30-35. |
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