A nanomanipulation system based on a sample-scanning AFM | |
Tian XJ(田孝军); Liu LQ(刘连庆); Jiao ND(焦念东); Xi N(席宁); Wang YC(王越超); Dong ZL(董再励) | |
2004 | |
会议名称 | IEEE International Conference on Robotics and Biomimetics (ROBIO 2004) |
会议日期 | August 22-26, 2004 |
会议地点 | Shenyang, China |
关键词 | AFM nanomanipulation 3D nano forces sensing probe positioning errors minimizing |
页码 | 623-628 |
中文摘要 | Atomic Force Microscope (AFM) has been proven to be a useful tool to characterize and change the sample surface down to the nanometer scale. However, in the AFM based nano manipulation, the main problem is the lack of real-time sensory feedback for an operator, which makes the manipulation almost in the dark and inefficient. For solving this problem, the AFM probe micro cantilever-tip is used not only as an end effector but also as a 3D nano forces sensor for sensing the interactive forces between the AFM probe tip and the object or substrate in nanomanipulation, and a kind of new and relatively easier parameters obtainment or calibration method in forces calculation has also been presented. In addition, for further improving probe positioning accuracy with a sample-scanning AFM, two important errors in probe positioning are quantitatively analyzed according to the tube scanner kinematics model presented in this paper, corresponding methods are adopted for minimizing the two errors and thus the probe positioning accuracy can be greatly improved. With 3D nano forces sensing through a haptic/force device and probe positioning accuracy improvement, the efficiency and accuracy of nano manipulation can be significantly improved. Experiments are presented to verify the effectiveness of the nanomanipulation system. |
收录类别 | EI ; CPCI(ISTP) |
产权排序 | 1 |
会议主办者 | IEEE Robot & Automat Soc, IEEE HK RA CS Joint Chapter, Chinese Acad Sci, Shenyang Inst Automat, Chinese High tech Dev Program, Robot Soc Japan, Japan Soc Mech Engineers, Int Rescue Syst Inst, Shenyang Hunnan New Urban Area, Shenyang New & High tech Ind Dev Zone |
会议录 | IEEE ROBIO 2004: Proceedings of the IEEE International Conference on Robotics and Biomimetics |
会议录出版者 | IEEE |
会议录出版地 | NEW YORK |
语种 | 英语 |
ISBN号 | 0-7803-8641-8 |
WOS记录号 | WOS:000234343000111 |
内容类型 | 会议论文 |
源URL | [http://ir.sia.cn/handle/173321/8492] |
专题 | 沈阳自动化研究所_机器人学研究室 |
推荐引用方式 GB/T 7714 | Tian XJ,Liu LQ,Jiao ND,et al. A nanomanipulation system based on a sample-scanning AFM[C]. 见:IEEE International Conference on Robotics and Biomimetics (ROBIO 2004). Shenyang, China. August 22-26, 2004. |
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