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	Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide
	Meng, Binbin; Yuan, Dandan; Zheng, Jian; Xu, Shaolin
刊名	MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
	2019
卷号	101
关键词	SiC Femtosecond laser Surface modification Deformation
ISSN号	1369-8001
DOI	10.1016/j.mssp.2019.05.022
URL标识	查看原文
收录类别	EI ; SCIE
语种	英语
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4263856
专题	武汉大学
推荐引用方式 GB/T 7714	Meng, Binbin,Yuan, Dandan,Zheng, Jian,et al. Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2019,101.
APA	Meng, Binbin,Yuan, Dandan,Zheng, Jian,&Xu, Shaolin.(2019).Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,101.
MLA	Meng, Binbin,et al."Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 101(2019).

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