Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity

	Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity
	Shang, YL ; Wang, JB ; Tu, S ; Liu, L ; Chen, DY
刊名	MICRO & NANO LETTERS
	2011
卷号	6 期号:7 Pages 页码:519-522
公开日期	2012-05-12
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/109051]
专题	上海微系统与信息技术研究所_传感技术联合国家重点实验室_期刊论文
推荐引用方式 GB/T 7714	Shang, YL,Wang, JB,Tu, S,et al. Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity[J]. MICRO & NANO LETTERS,2011,6(7 Pages):519-522.
APA	Shang, YL,Wang, JB,Tu, S,Liu, L,&Chen, DY.(2011).Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity.MICRO & NANO LETTERS,6(7 Pages),519-522.
MLA	Shang, YL,et al."Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity".MICRO & NANO LETTERS 6.7 Pages(2011):519-522.