Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor

	Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor
	Wu,AM ; Wei,X ; Yang,ZF ; Chen,J ; Chen,M ; Bi,DW ; Zhang,ZX ; Wang,X
刊名	SENSORS AND MATERIALS
	2011
卷号	23 期号:3 页码:159-166
关键词	MYU
ISSN号	0914-4935
学科主题	Instruments & Instrumentation; Materials Science ; Multidisciplinary
公开日期	2012-04-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/106735]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Wu,AM,Wei,X,Yang,ZF,et al. Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor[J]. SENSORS AND MATERIALS,2011,23(3):159-166.
APA	Wu,AM.,Wei,X.,Yang,ZF.,Chen,J.,Chen,M.,...&Wang,X.(2011).Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor.SENSORS AND MATERIALS,23(3),159-166.
MLA	Wu,AM,et al."Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor".SENSORS AND MATERIALS 23.3(2011):159-166.