Observations of interfaces in direct wafer-bonded InP-GaAs structures

	Observations of interfaces in direct wafer-bonded InP-GaAs structures
	Lao, YF ; Wu, HZ ; Li, M
刊名	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
	2005
卷号	23 期号:6 页码:2351-2356
关键词	FUSION LASERS INTEGRATION
ISSN号	1071-1023
通讯作者	Wu, HZ, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95331]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Lao, YF,Wu, HZ,Li, M. Observations of interfaces in direct wafer-bonded InP-GaAs structures[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2005,23(6):2351-2356.
APA	Lao, YF,Wu, HZ,&Li, M.(2005).Observations of interfaces in direct wafer-bonded InP-GaAs structures.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,23(6),2351-2356.
MLA	Lao, YF,et al."Observations of interfaces in direct wafer-bonded InP-GaAs structures".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 23.6(2005):2351-2356.