Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects

	Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects
	Di, ZF ; Chu, PK ; Zhu, M ; Fu, RKY ; Luo, SH ; Shao, L ; Nastasi, M ; Chen, P ; Alford, TL ; Mayer, JW ; Zhang, M ; Liu, WL ; Song, ZT ; Lin, CL
刊名	APPLIED PHYSICS LETTERS
	2006
卷号	88 期号:14 页码:142108-142108
关键词	SILICON-ON-DIAMOND IMPLANTATION TECHNOLOGY MOSFETS
ISSN号	0003-6951
通讯作者	Chu, PK, City Univ Hong Kong, Dept Phys Mat Sci, Tat Chee Ave, Kowloon, Hong Kong, Peoples R China
学科主题	Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95225]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Di, ZF,Chu, PK,Zhu, M,et al. Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects[J]. APPLIED PHYSICS LETTERS,2006,88(14):142108-142108.
APA	Di, ZF.,Chu, PK.,Zhu, M.,Fu, RKY.,Luo, SH.,...&Lin, CL.(2006).Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects.APPLIED PHYSICS LETTERS,88(14),142108-142108.
MLA	Di, ZF,et al."Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects".APPLIED PHYSICS LETTERS 88.14(2006):142108-142108.