A study of optical characteristics of damage in oxygen-implanted 6H-SiC

	A study of optical characteristics of damage in oxygen-implanted 6H-SiC
	Wang,LW ; Huang,JP ; Lin,CL ; Zou,SC ; Zheng,YX ; Wang,XJ ; Huang,DM ; Zetterling,CM ; Ostling,M
刊名	JOURNAL OF MATERIALS SCIENCE LETTERS
	1999
卷号	18 期号:12 页码:979-982
关键词	ENHANCED THERMAL-OXIDATION SILICON-CARBIDE ION-IMPLANTATION THIN-FILMS AMORPHIZATION LAYERS
ISSN号	0261-8028
通讯作者	Wang, LW, Acad Sinica, Shanghai Inst Met, State Key Lab Funct Mat Informat & Ion Beam Lab, Shanghai 200050, Peoples R China
学科主题	Materials Science ; Multidisciplinary
收录类别	SCI
原文出处	http://www.springerlink.com/content/r50864x03716p226/
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/99066]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Wang,LW,Huang,JP,Lin,CL,et al. A study of optical characteristics of damage in oxygen-implanted 6H-SiC[J]. JOURNAL OF MATERIALS SCIENCE LETTERS,1999,18(12):979-982.
APA	Wang,LW.,Huang,JP.,Lin,CL.,Zou,SC.,Zheng,YX.,...&Ostling,M.(1999).A study of optical characteristics of damage in oxygen-implanted 6H-SiC.JOURNAL OF MATERIALS SCIENCE LETTERS,18(12),979-982.
MLA	Wang,LW,et al."A study of optical characteristics of damage in oxygen-implanted 6H-SiC".JOURNAL OF MATERIALS SCIENCE LETTERS 18.12(1999):979-982.