Preparation of thin films by filtered are deposition and ion assisted arc deposition

CORC > 上海微系统与信息技术研究所 > 功能材料与器件 > 期刊论文（1999年以前)

	Preparation of thin films by filtered are deposition and ion assisted arc deposition
	Zhao,JP ; Wang,X ; Chen,ZY ; Yang,SQ ; Shi,TS ; Liu,XH ; Zou,SC
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	1997
卷号	127 期号:0 页码:817-820
ISSN号	0168-583X
通讯作者	Zhao, JP, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Instruments & Instrumentation; Nuclear Science & Technology; Physics ; Atomic ; Molecular & Chemical; Physics ; Nuclear
收录类别	SCI
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98854]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Zhao,JP,Wang,X,Chen,ZY,et al. Preparation of thin films by filtered are deposition and ion assisted arc deposition[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1997,127(0):817-820.
APA	Zhao,JP.,Wang,X.,Chen,ZY.,Yang,SQ.,Shi,TS.,...&Zou,SC.(1997).Preparation of thin films by filtered are deposition and ion assisted arc deposition.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,127(0),817-820.
MLA	Zhao,JP,et al."Preparation of thin films by filtered are deposition and ion assisted arc deposition".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 127.0(1997):817-820.