Experimental studies of N+ implantation into CVD diamond thin films

	Experimental studies of N+ implantation into CVD diamond thin films
	Xin,HP ; Lin,CL ; Wang,JX ; Zou,SC ; Shi,XH ; Lin,ZX ; Zhou,ZY ; Liu,ZG
刊名	SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
	1997
卷号	40 期号:4 页码:361-368
关键词	ION
ISSN号	1006-9321
通讯作者	Xin, HP, CHINESE ACAD SCI,SHANGHAI INST MET,NATL LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Engineering ; Multidisciplinary; Materials Science ; Multidisciplinary
收录类别	SCI
原文出处	http://www.springerlink.com/content/q0277183w8264146/
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98796]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Xin,HP,Lin,CL,Wang,JX,et al. Experimental studies of N+ implantation into CVD diamond thin films[J]. SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,1997,40(4):361-368.
APA	Xin,HP.,Lin,CL.,Wang,JX.,Zou,SC.,Shi,XH.,...&Liu,ZG.(1997).Experimental studies of N+ implantation into CVD diamond thin films.SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,40(4),361-368.
MLA	Xin,HP,et al."Experimental studies of N+ implantation into CVD diamond thin films".SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES 40.4(1997):361-368.