SIFN-IMPLANTED GAAS AND SHALLOW JUNCTIONS

CORC > 上海微系统与信息技术研究所 > 功能材料与器件 > 期刊论文（1999年以前)

	SIFN-IMPLANTED GAAS AND SHALLOW JUNCTIONS
	ZHAO, QH ; JIANG, XY ; LIN, CL ; FAN, WD ; WANG, WY ; LIU, XG
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	1989
卷号	Aug-37 页码:336-338
ISSN号	0168-583X
通讯作者	ZHAO, QH, ACAD SINICA,SHANGHAI INST MET,865 CHANG NING RD,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear
收录类别	SCI
原文出处	http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=59&SID=Q26DlFL3JiAkALfNmLj&page=1&doc=1
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98192]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	ZHAO, QH,JIANG, XY,LIN, CL,et al. SIFN-IMPLANTED GAAS AND SHALLOW JUNCTIONS[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1989,Aug-37:336-338.
APA	ZHAO, QH,JIANG, XY,LIN, CL,FAN, WD,WANG, WY,&LIU, XG.(1989).SIFN-IMPLANTED GAAS AND SHALLOW JUNCTIONS.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,Aug-37,336-338.
MLA	ZHAO, QH,et al."SIFN-IMPLANTED GAAS AND SHALLOW JUNCTIONS".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Aug-37(1989):336-338.