| Effect of annealing temperature and composition on photoluminescence properties of magnetron sputtered SiCN films | |
| Peng, Yinqiao; Zhou, Jicheng*; Zhao, Baoxing; Tan, Xiaochao; Zhang, Zhichao | |
| 刊名 | Thin Solid Films
 |
| 2011 | |
| 卷号 | 519期号:7页码:2083-2086 |
| 关键词 | Silicon carbonitride Sputtering Annealing Composition Structure Photoluminescence |
| ISSN号 | 0040-6090 |
| DOI | 10.1016/j.tsf.2010.10.058 |
| URL标识 | 查看原文 |
| WOS记录号 | WOS:000287543300007;EI:20110413623534 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3346254 |
| 专题 | 中南大学 |
| 作者单位 | 1.[Tan, Xiaochao 2.Zhang, Zhichao 3.Zhao, Baoxing 4.Peng, Yinqiao 5.Zhou, Jicheng] Cent S Univ, Changsha 410083, Hunan, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Peng, Yinqiao,Zhou, Jicheng*,Zhao, Baoxing,et al. Effect of annealing temperature and composition on photoluminescence properties of magnetron sputtered SiCN films[J]. Thin Solid Films,2011,519(7):2083-2086. |
| APA | Peng, Yinqiao,Zhou, Jicheng*,Zhao, Baoxing,Tan, Xiaochao,&Zhang, Zhichao.(2011).Effect of annealing temperature and composition on photoluminescence properties of magnetron sputtered SiCN films.Thin Solid Films,519(7),2083-2086. |
| MLA | Peng, Yinqiao,et al."Effect of annealing temperature and composition on photoluminescence properties of magnetron sputtered SiCN films".Thin Solid Films 519.7(2011):2083-2086. |
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